Substrate treatment system
AssigneeVon Ardenne Anlagentechnik GmbH
InventorHenrik OBST
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Abstract
A substrate treatment system for treating substrates includes a system chamber, delimited by chamber walls, at least one substrate treatment device and a transportation device inside the system chamber. The transportation device has an arrangement of transportation rollers arranged one behind the other in the transportation direction, for vertical or horizontal transportation of substrates. At least a first group of transportation rollers which are arranged immediately one behind the other, each has its own drive device.
Claims10
Substrate treatment system for treating substrates, comprising a system chamber delimited by chamber walls, at least one substrate treatment device, and a transportation device inside the system chamber, the transportation device having an arrangement of transportation rollers arranged one behind another in a transportation direction, for vertical or horizontal transportation of substrates, wherein, at least in a first group of the transportation rollers arranged immediately one behind another, each transportation roller has a respective drive device.
Dependencies are inferred from the claim text.