Imprint product and method for producing the same
AssigneeMitsui Chemicals, Inc.
InventorsTadahiro Sunaga, Takashi Oda, Hitoshi Onishi
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Abstract
Provided is an imprint product, which is for transcribing a fine pattern of a mold surface and which contains a fluorine-containing cyclic olefin polymer containing repeating unit represented by formula (1) and having a fluorine atom content rate of 40% to 75% by mass.
Claims12
An imprint product on which a fine pattern of a mold surface is transcribed, wherein the imprint product is comprised of a fluorine-containing cyclic olefin polymer containing a repeating structural unit represented by formula (1) and having a fluorine atom content rate of 40% to 75% by mass:
- wherein in the formula (1), at least one of R1 to R4 represents fluorine, a fluorine-containing C1-C10 alkyl, a fluorine-containing C1-C10 alkoxy, or a fluorine-containing C2-C10 alkoxyalkyl;
- when R1 to R4 represent groups containing no fluorine, R1 to R4 are each selected from hydrogen, a C1-C10 alkyl, a C1-C10 alkoxy, and a C2-C10 alkoxyalkyl;
- each of R1 to R4 may be identical with or different from the others;
- and R1 to R4 may be joined together to form a cyclic structure.
A resin composition for pattern transcription for obtaining an imprint product on which a fine pattern of a mold surface is transcribed, comprising a fluorine-containing cyclic olefin polymer containing a repeating structural unit represented by formula (1) and having a fluorine atom content rate of 40% to 75% by mass:
- wherein in the formula (1), at least one of R1 to R4 represents fluorine, a fluorine-containing C1-C10 alkyl, a fluorine-containing C1-C10 alkoxy, or a fluorine-containing C2-C10 alkoxyalkyl;
- when R1 to R4 represent groups containing no fluorine, R1 to R4 are each selected from hydrogen, a C1-C10 alkyl, a C1-C10 alkoxy, and a C2-C10 alkoxyalkyl;
- each of R1 to R4 may be identical with or different from the others;
- and R1 to R4 may be joined together to form a cyclic structure.
Dependencies are inferred from the claim text.