Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method

A movable body drive method in which a movable body is driven substantially along a two-dimensional plane, the method comprising:

• a first process in which the movable body is driven based on an output of a first detection device that has a plurality of detection positions placed in at least a part of an operating area of the movable body, and detects positional information of the movable body in a direction perpendicular to the two-dimensional plane using detection information detected when the movable body is positioned at any one of the detection positions, and the output of an encoder system that measures positional information of the movable body within a plane parallel to the two-dimensional plane in directions of three degrees of freedom;
• and
• a second process in which in the case of switching from servo control of the position of the movable body in the directions of three degrees of freedom using the encoder system, to a control of the position of the movable body in the directions of three degrees of freedom using a second detection device that detects positional information in directions of three degrees of freedom within a plane parallel to the two-dimensional plane from measurement results using a measurement beam irradiated along the two-dimensional plane between the outside of the operating are of the movable body and the movable body, a detection device used for control of the position of the movable body in the remaining directions of three degrees of freedom is switched from the first detection device to a third detection device that detects positional information of the movable body in the direction perpendicular to the two-dimensional plane and a tilt direction with respect to the two-dimensional plane from measurement results using a measurement beam irradiated along the two-dimensional plane between the outside of the operating area of the movable body and the movable body at the point where the movable body is suspended.

A movable body drive system in which a movable body is driven along a substantially two-dimensional plane, the system comprising:

• a first detection device that has a plurality of detection positions placed in at least a part of an operating area of the movable body, and detects positional information of the movable body in a direction perpendicular to the two-dimensional plane using detection information detected when the movable body is positioned at any one of the detection points;
• an encoder system that measures positional information of the movable body in directions of three degrees of freedom;
• a second detection device that detects positional information of the movable body in directions of three degrees of freedom within a plane parallel to the two-dimensional plane from measurement results using a measurement beam irradiated along the two-dimensional plane between the outside of the operating area of the movable body and the movable body;
• a third detection device that detects positional information of the movable body in a direction perpendicular to the two-dimensional plane and a tilt direction with respect to the two-dimensional plane from measurement results using a measurement beam irradiated along the two-dimensional plane between the outside of the operating area of the movable body and the movable body;
• and
• a controller that switches a detection device which detects positional information of the movable body in the direction perpendicular to the two-dimensional plane and the tilt direction around at least one axis with respect to the two-dimensional plane from the third detection device when the movable body is in a suspended state to the first detection device, on switching from servo control of the position in the directions of three degrees of freedom of the movable body using the second detection device to servo control of the position in the directions of three degrees of freedom of the movable body using the encoder system.

A movable body drive system in which a movable body is driven along a substantially two-dimensional plane, the system comprising:

• a first detection device that has a plurality of detection positions placed in at least apart of an operating area of the movable body, and detects positional information of the movable body in a direction perpendicular to the two-dimensional plane using detection information detected when the movable body is positioned at anyone of the detection points;
• an encoder system that measures positional information of the movable body within a plane parallel to the two-dimensional plane in directions of three degrees of freedom;
• a second detection device that detects positional information of the movable body in directions of three degrees of freedom within a plane parallel to the two-dimensional plane from measurement results using a measurement beam irradiated along the two-dimensional plane between the outside of the operating area of the movable body and the movable body;
• a third detection device that detects positional information of the movable body in a direction perpendicular to the two-dimensional plane and a tilt direction with respect to the two-dimensional plane from measurement results using a measurement beam irradiated along the two-dimensional plane between the outside of the operating area of the movable body and the movable body;
• and
• a controller that switches a measurement device used for controlling the position of the movable body in the remaining directions of three degrees of freedom from the first detection device to the third detection device at the point where the movable body is suspended, in the case of switching from servo control of the position of the movable body using the encoder system to control of the position of the movable body in the directions of three degrees of freedom using the second detection device.