Fuse Structures, E-Fuses Comprising Fuse Structures, and Semiconductor Devices Comprising E-Fuses
AssigneeSamsung Electronics Co., Ltd.
InventorsSeong-Ho Kim, Won-Mo Park, Gil-Sub Kim, Ho-Ju Song
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Abstract
A fuse structure, an e-fuse including the fuse structure and a semiconductor device including the e-fuse are disclosed. The fuse structure includes first and second electrodes extending in a first direction, and spaced a predetermined distance apart from each other and having one ends thereof facing each other, an insulation layer formed between the one end of the first electrode and the one end of the second electrode facing each other, and a conductive film overlapping portions of the first and second electrodes on the insulation layer and contacting the first electrode and the one end of the second electrode.
Claims20
A fuse structure, comprising:
- first and second electrodes extending in a first direction, the first and second electrodes having first ends thereof facing each other and spaced a predetermined distance apart from each other;
- an insulation layer between the first end of the first electrode and the first end of the second electrode;
- and
- a conductive film on the insulation layer and contacting portions of the first and second electrodes.
An electronic fuse (e-fuse), comprising:
- a first lower electrode pattern on a substrate and extending in a first direction;
- a second lower electrode pattern on the substrate and extending in the first direction and spaced apart from the first lower electrode pattern in the first direction;
- a dummy electrode pattern extending in parallel with the first and second lower electrode patterns in the first direction;
- an insulation layer on the substrate between the first and second lower electrode patterns;
- and
- a conductive film on the insulation layer and contacting the first and second lower electrode patterns.
A semiconductor device comprising:
- a substrate having cell array regions and a fuse region therein;
- a first lower electrode pattern on the fuse region of the substrate and extending in a first direction;
- a second lower electrode pattern on the fuse region of the substrate and extending in the first direction and spaced apart from the first lower electrode pattern in the first direction;
- a dummy electrode pattern extending in parallel with the first and second lower electrode patterns in the first direction;
- an insulation layer on the fuse region of the substrate between the first and second lower electrode patterns;
- and
- a fuse conductive film pattern on the insulation layer and contacting the first and second lower electrode patterns.
Dependencies are inferred from the claim text.