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US 2011/0298066 A1Published application
Micro structure, micro electro mechanical system therewith, and manufacturing method thereof
AssigneeSamsung Techwin Co., Ltd.
InventorsJong-wan KIM, Seung-min CHO
Life of this patent
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Abstract
A micro structure includes a base member; a supporting unit disposed on a surface of the base member; a graphene unit which covers at least a portion of the supporting unit and at least a portion of an empty space adjacent to the supporting unit; and a structure unit disposed on at least a portion of the graphene unit over the supporting unit.
Claims20
A micro structure comprising:
- a base member;
- a supporting unit disposed on a surface of the base member;
- a graphene unit which covers at least a portion of the supporting unit and at least a portion of an empty space adjacent to the supporting unit;
- and
- a structure unit disposed on at least a portion of the graphene unit over the supporting unit.
2 more elements
A method of manufacturing a micro structure, the method comprising:
- forming a supporting layer on a surface of a base member;
- forming a supporting pattern by patterning the supporting layer;
- forming a graphene layer which covers at least a portion of the supporting pattern;
- forming a structure layer on at least a portion of the graphene layer over the supporting pattern;
- and
- forming a structure unit by patterning the structure layer.
3 more elements
A micro structure comprising:
- a base member;
- a supporting unit disposed on the base member;
- a graphene unit disposed on at least a portion of the supporting unit, wherein the graphene unit extends beyond the supporting unit over an empty space adjacent to the supporting unit;
- a structure unit disposed on the graphene unit.
1 more element
A method of manufacturing a micro structure, the method comprising:
- forming a supporting unit on a base member;
- forming a graphene unit on at least a portion of the supporting unit, wherein the graphene unit extends beyond the supporting unit over an empty space adjacent to the supporting unit;
- forming a structure unit on the graphene unit.
Dependencies are inferred from the claim text.