Charged particle beam device and method for correcting position with respect to charged particle beam

A position correction processing method in a charged particle beam apparatus comprising the steps of:

• registering a first image of a position correction mark acquired by scanning a charged particle beam from a first observation direction, into an arithmetic unit;
• registering a second image of a position correction mark acquired by scanning the charged particle beam from a second observation direction, into said arithmetic unit;
• and
• comparing, by said arithmetic unit, the first image with an image obtained by sequentially performing first image processing, second image processing, and third image processing for the second image, the first image processing being rotation transformation by an angle between a perpendicular to a plane formed by the first and the second observation directions, and a deflection-and-scan direction of the charged particle beam, the second image processing being vertical-direction expansion transformation that is multiplied by the inverse of the cosine of an angle between the first and the second observation directions, the third image processing being rotation transformation in the direction inverse to the rotation transformation of the first image processing.