Mirror angular-positioning apparatus and processing apparatus

A processing apparatus for irradiating an object with a laser light, the processing apparatus comprising:

• an apparatus for angular positioning of a mirror;
• and
• an irradiation unit configured to irradiate the mirror with the laser light,
• wherein the apparatus for angular positioning of a mirror comprises:
• a mirror;
• a motor configured to rotate the mirror;
• a detector configured to detect a rotational angle of the mirror;
• and
• a controller configured to supply an electric current to the motor so that the rotational angle of the mirror reaches a target angle, to estimate, based on a model representing a relation between a value of the electric current to be supplied to the motor and a face tangle error angle of the mirror, a face tangle error angle of the mirror in a case where the electric current is supplied to the motor, and to, if the estimated angle exceeds a tolerance, cause the irradiation unit to wait for irradiating of the apparatus with the laser light.