Fluidized web polishing apparatus and method using contact pressure feedback

A flexible foil bearing abrasive article for polishing a substrate surface, the abrasive article comprising:

• a preloader assembly;
• a flexible foil web held over the preloader assembly, the flexible foil web further comprising:
• a first surface comprising one or more fluid bearings fabricated on the flexible foil web to generate lift forces during motion of the abrasive article relative to the substrate surface;
• a second surface engaging the preloader assembly;
• and
• a mechanism that biases the second surface of the abrasive members toward the substrate surface.

A flexible foil bearing abrasive article for polishing a substrate surface, the abrasive article comprising:

• a flexible foil web under tension;
• a hydrostatic preloader comprising a plurality of closed form hydrostatic beds separated by grooves connected to ambient pressure;
• a first non abrasive foil surface associated with the flexible foil web;
• a second abrasive foil surface associated with the flexible foil web;
• the first non abrasive foil surface engaging the hydrostatic preloader to impart bearing surfaces on the abrasive second flexible foil bearing surface;
• a mechanism that biases the second abrasive surface toward the substrate surface;
• and
• an abrasive feature located on the second surface of the flexible foil web, the abrasive feature applying cutting forces to the substrate surface during motion of the abrasive article relative to the substrate surface.

A flexible foil bearing abrasive article for polishing a substrate surface, the abrasive article comprising:

• a foil hydrodynamic bearing suspended with non straight links between two tensioned tapes;
• a mechanism that biases the second surfaces of the abrasive members toward the substrate surface;
• and
• abrasive features located on a surface of the flexible foil nearest the substrate surface, the abrasive features applying cutting forces to the substrate during motion of the abrasive article relative to the substrate.

A method of polishing a surface of a substrate, the method comprising:

• biasing a flexible foil web under tension wrapped around a hydrostatic preloader toward the surface of the substrate;
• pressurizing an abrasive surface of the flexible foil web to provide a contact pressure for the abrasive surface;
• and
• monitoring the pressure between the substrate and the abrasive with a pressure opening in the hydrostatic preloader.