Multiple precursor concentric delivery showerhead

A substrate processing apparatus, comprising:

• a chamber body;
• a substrate support;
• and
• a showerhead apparatus, wherein a processing volume is defined by the chamber body, the substrate support, and the showerhead apparatus, and wherein the showerhead apparatus comprises:
• a first gas channel coupled to a first gas inlet;
• a second gas channel coupled to a second gas inlet, wherein the first gas channel is isolated from the second gas channel;
• a temperature control channel coupled to a heat exchanging system configured to supply a heat exchanging fluid through the temperature control channel;
• a plurality of first gas conduits extending through the temperature control channel and fluidly coupling the first gas channel to the processing volume;
• and
• a plurality of second gas conduits extending through the temperature control channel and fluidly coupling the second gas channel to the processing volume, wherein at least one of the first gas conduits is concentrically disposed within at least one of the second gas conduits.

A method of processing substrates, comprising:

• introducing a first gas into a processing volume of a processing chamber through a first gas inlet coupled to a first gas channel of a showerhead assembly;
• introducing a second gas into the processing volume of the processing chamber through a second gas inlet coupled to a second gas channel of the showerhead assembly, wherein the first gas channel is isolated from the second gas channel, wherein the first gas is delivered into the processing volume through a plurality of first plurality of second gas conduits, and wherein at least one of the first gas conduits is concentrically disposed within at least one of the second gas conduits;
• and
• cooling the showerhead assembly by flowing a heat exchanging fluid through a temperature control channel disposed in the showerhead assembly, wherein the plurality of first and second gas conduits are disposed through the heat exchanging channel.