Fluid filtration for substrate processing chamber
AssigneeApplied Materials, Inc.
InventorsDustin W. HO, Juan Carlos ROCHA-ALVAREZ, Hichem M'SAAD
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Abstract
A filter for filtering a fluid in a substrate processing apparatus comprises first and second stages that are connected to one another. A delivery system provides a vaporized liquid to the filter. The first stage of the filter comprises a basic compound, and the second stage of the filter comprises a desiccant. A second filter comprises a permeation filter with permeable membrane to filter the fluid. Methods of filtering the fluid to reduce formation of undesirable process residues using the filter(s) are also described.
Claims20
A filter for filtering a fluid in a substrate processing apparatus, the filter comprising:
- (a) a first stage comprising a basic compound;
- and
- (b) a second stage connected to the first stage, the second stage comprising a desiccant.
A method of filtering a fluid for a substrate processing apparatus, the method comprising:
- (a) exposing the fluid to a basic compound;
- and
- (b) removing water from the fluid.
A permeation filter for filtering a fluid in a substrate processing apparatus, the permeation filter comprising:
- (a) a first compartment comprising an inlet to receive a fluid and an outlet to release filtered fluid;
- (b) a second compartment having a vacuum port capable of being connected to a vacuum system;
- and
- (c) a permeable membrane separating the first compartment from the second compartment.
A method of filtering a fluid for a substrate processing apparatus, the method comprising:
- (a) passing the fluid past the permeable membrane;
- and
- (b) maintaining a pressure differential across the permeable membrane, whereby impurities permeate through the permeable membrane.
Dependencies are inferred from the claim text.