Use of a rolling-element bearing for bearing rotating components in vacuum devices and vacuum device
AssigneeOerlikon Leybold Vacuum GmbH
InventorsRalf Adamietz, Petra Adamietz, Rainer Hoelzer, Markus Henry
Life of this patent
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Abstract
A rolling-element bearing for bearing rotating components in vacuum devices includes a plurality of rolling elements (10) arranged between bearing elements (12, 14). A bearing compartment (26) is for example closed by sealing elements (22, 24) on both sides. The sealing elements (22, 24) have a minor sealing gap(s). The rolling-elements bearing is used in vacuum sections in which a pressure of less than 10−3 mbar prevails.
Claims20
Use of a rolling-element bearing for supporting rotating components in vacuum devices, comprising
- a plurality of rolling elements arranged in a bearing space between two bearing elements, and
- at least one sealing element which seals the bearing space on at least one side against a vacuum section, the sealing element being fixedly connected to one of the two bearing elements or to a component connected to said bearing element, and wherein, in order to form a gap ring seal, the sealing element is arranged at a distance s from the other bearing element or from a component connected to said bearing element, with the distance s being smaller than a mean free path of the molecules in the vacuum section,
- wherein a pressure in the vacuum section is lower than 10−3 mbar.
A vacuum device, in particular a vacuum pump, comprising
- pumping elements disposed in a suction chamber,
- at least one rotating shaft supporting the pumping elements,
- at least two bearing arrangements supporting the shaft, at least one of said bearing arrangements being a rolling-element bearing, comprising:
- a plurality of rolling elements arranged in a bearing space between two bearing elements, and
- at least one sealing element for sealing the bearing space on at least one side against a vacuum section,
- wherein the sealing element is fixedly connected to one of the two bearing elements or to a component connected to said bearing element, and wherein, in order to form a gap ring seal, the sealing element is arranged at a distance s from the other bearing element or from a component connected to said bearing element, with the distance s being smaller than the mean free path of the molecules in the vacuum section,
- wherein the pumping elements can draw a pressure in the vacuum section to less than 10−3 mbar.
A rolling-element bearing for supporting rotating components in vacuum devices comprising:
- a plurality of rolling-elements arranged in a bearing space between two bearing elements, and
- at least one sealing element which seals the bearing space on at least one side against a vacuum section, the sealing element being fixedly connected to one of the two bearing elements or to a component connected to said bearing element, and wherein, in order to form a gap ring seal, the sealing element being arranged at a distance from the other bearing element or from a component connected to said bearing element, with the distance being smaller than the mean free path of the molecules in the vacuum section, wherein the pressure in the vacuum section is lower than 10−3 mbar.
Dependencies are inferred from the claim text.