EUV mirror module
AssigneeMedia Lario S.R.L.
InventorJacques Kools
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Abstract
An EUV mirror module is disclosed that comprises a substrate with a curved upper surface and a curved electroformed mirror. A self-adjusting bonding material is disposed between the substrate and the electroformed mirror. The bonding material is flowable at a melting temperature and self-adjusts to conformally fill the region between substrate to the electroformed mirror and bond the substrate and the electroformed mirror. The substrate may have at least one cooling channel for cooling the mirror module.
Claims20
An extreme ultraviolet (EUV) mirror module, comprising:
- a substrate having a body with a curved upper surface;
- a electroformed mirror having front and rear curved surfaces;
- and
- a self-adjusting bonding material disposed between the substrate upper surface and the electroformed mirror rear surface, the bonding material being flowable at a melting temperature and serving to bond the substrate to the electroformed mirror at a temperature below the melting temperature.
A method of forming an extreme ultraviolet (EUV) mirror module, comprising:
- providing a substrate having a body with a curved upper surface;
- providing a electroformed mirror having front and rear curved surfaces;
- disposing a self-adjusting bonding material between the substrate upper surface and the electroformed mirror rear surface, the bonding material having a melting point;
- heating the bonding material to its melting point, thereby causing the bonding material to flow between the substrate upper surface and the electroformed mirror rear surface;
- and
- cooling the bonding material to below its melting point, thereby forming a thermally conductive bond between the electroformed mirror and the substrate.
Dependencies are inferred from the claim text.