US 2011/0254228 A1 · Thermal Chamber

Abstract

A process chamber that provides an interior surface and an exterior surface is confined within a containment chamber. Secured to the containment chamber is a collar that communicates with the process chamber. A seal formed between the process chamber and the collar, includes at least an adjustable backing ring encircling the exterior surface of the process chamber, a preload ring secured to the collar, and a sealing structure encircling the process chamber and positioned between the adjustable backing ring and the preload ring. The adjustable backing ring is adjustably secured a predetermined distance from the preload ring, based on a perimeter dimension of the process chamber, to form the seal between the process chamber and the collar.

Claims20

Dependent claims

A thermal chamber comprising:

a containment chamber;
a process chamber confined within the containment chamber, the process chamber having an interior surface and an exterior surface;
a collar communicating with the process chamber and secured to the containment chamber;
and
a seal formed between the process chamber and the collar, the seal formed between the process chamber and the collar comprising:
an adjustable backing ring encircling the exterior surface;
a preload ring secured to the collar;
and
a sealing structure encircling the process chamber and disposed between the adjustable backing ring and the preload ring, in which the adjustable backing ring is adjustably secured a predetermined distance from the preload ring, based on a perimeter dimension of the process chamber, to form the seal between the process chamber and the collar.

6 more elements

A method of forming a thermal chamber by steps comprising:

providing a containment chamber;
confining a process chamber within the containment chamber, the process chamber having an interior surface and an exterior surface;
securing a collar to the containment chamber, the collar communicating with the process chamber;
and
forming a seal between the process chamber and the collar, the seal between the process chamber and the collar comprising:
an adjustable backing ring encircling the exterior surface;
a preload ring secured to the collar;
and
a sealing structure encircling the process chamber and disposed between the adjustable backing ring and the preload ring, in which the adjustable backing ring is adjustably secured a predetermined distance from the preload ring based on a perimeter dimension of the process chamber to form the seal between the process chamber and the collar.

6 more elements

Dependencies are inferred from the claim text.

Thermal Chamber

Life of this patent

Thermal Chamber

Life of this patent

Abstract

Claims20