Method for forming concave-convex pattern and apparatus for preparing concave-convex pattern
AssigneeBridgestone Corporation
InventorsTakato Inamiya, Eizou Kaida
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AssigneeBridgestone Corporation
InventorsTakato Inamiya, Eizou Kaida
Estimating the term…
The present invention provides a method for forming concave-convex pattern corresponding to a nanoimprint method which is advantageously utilized in the preparation of electronic devices, optical parts and recording media, and enabling the preparation of the product having the fine pattern mentioned above in cheapness and high speed. The method for forming a concave-convex pattern comprises of the steps: a step of placing and depressing a stamper having a fine concave-convex pattern surface thereon on a photo-curable transfer layer of a photo-curable transfer sheet to form a laminate; a step of exposing the photo-curable transfer layer of the laminate having the stamper to ultraviolet rays to cure the photo-curable transfer layer, and removing the stamper from the laminate to form the inverted fine concave-convex pattern on a surface of the photo-curable transfer layer; a step of placing and depressing the intermediate stamper on a photo-curable transfer layer of another photo-curable transfer sheet to form a laminate; and a step of exposing the photo-curable transfer layer of the laminate having the intermediate stamper to ultraviolet rays to cure the photo-curable transfer layer, and removing the intermediate stamper, whereby the photo-curable transfer sheet having the fine concave-convex pattern surface is obtained.
A method for forming a concave-convex pattern comprising of the steps (1) to (4):
An apparatus for preparing a concave-convex pattern comprising:
Dependencies are inferred from the claim text.