Low-temperature absorber film and method of fabrication
AssigneeInternational Business Machines Corporation
InventorsKatherina E. Babich, Pratik P. Joshi, Kam Leung Lee, Deborah A. Neumayer, Spyridon Skordas
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Abstract
An improved low-temperature absorber, amorphous carbonitride (ACN) with an extinction coefficient (k) of greater than 0.15, and an emissivity of greater than 0.8 is disclosed. The ACN film can also be characterized as having a minimum of hydrocarbon content as observed by FTIR. The ACN film can be used as an effective absorbing layer that absorbs a wide range of electromagnetic radiation from different sources including lasers or flash lamps. A method of forming such an ACN film at a deposition temperature of less than, or equal to, 450° C. is also provided.
Claims25
An electromagnetic absorber comprising an amorphous carbonitride film having an extinction coefficient of greater than 0.2 and an emissivity of greater than 0.8.
A structure comprising an amorphous carbonitride film disposed on an upper surface of a substrate, wherein said amorphous carbonitride film has an extinction coefficient greater than 0.2 and an emissivity of greater than 0.8.
A method comprising:
- depositing an amorphous carbonitride film on an upper surface of a substrate at a deposition temperature of less than, or equal to 450° C., wherein said amorphous carbonitride film has an extinction coefficient of greater than 0.2 and an emissivity of greater than 0.8.
Dependencies are inferred from the claim text.