Integrated circuit with spurrious acoustic mode suppression and method of manufacture thereof
AssigneeKoninklijke Philips Electronics N.V.
InventorsWilliam Ossmann, Bernie J. Savord, Jie Chen, Rod J. Solomon
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Abstract
An integrated circuit (IC) apparatus includes a substrate having opposed first and second major sides and one or more edges defining an outer periphery of the substrate. The substrate may be a semiconductor material. The IC apparatus may further include one or more transducers situated on the first major side of the substrate; and an attenuation pattern formed in at least one of the second major side and one or more of the edges of the substrate.
Claims20
An integrated circuit (IC) apparatus, comprising:
- a substrate having opposed first and second major sides and one or more edges defining an outer periphery of the substrate, the substrate comprising a semiconductor material;
- one or more transducers situated on the first major side of the substrate;
- and
- an attenuation pattern formed in one or more of the edges of the substrate.
A method for forming a transducer, the method comprising the acts of:
- forming edges on a semiconductor substrate which define a closed area having opposed first and second major surfaces;
- removing portions of one or more edges of the semiconductor substrate so as to form an attenuation pattern configured to attenuate spurious signals in the semiconductor substrate;
- and
- forming a transducer array on the first major surface of the semiconductor substrate.
An integrated circuit (IC) apparatus, comprising:
- a transducer array comprising a plurality of piezo-electric transducers (PZTs);
- a semiconductor substrate having opposed first and second major portions defined by edges, the transducer array being located on the first major portion;
- and
- an attenuation pattern located on one or more edges of the semiconductor substrate, the attenuation pattern configured to attenuate spurious signals within the semiconductor substrate.
Dependencies are inferred from the claim text.