Method and apparatus for forming mems device

A MEMS sensor, comprising:

• a plurality of cavities projecting from a substrate, the plurality of cavities arranged in an array and each cavity having a hollow interior separating a top portion and a bottom portion of the cavity;
• a plurality of diaphragm layers formed over the array;
• a first electrode communicating with the plurality of diaphragms layers defining a plurality of complementary electrodes;
• a meter in communication with the plurality of complementary electrodes for detecting a capacitance change between the at least one first electrode and its respective diaphragm when an external signal impacts the diaphragm.

A tunable mirror, comprising:

• a plurality of supports arranged on a substrate to support a deformable reflector;
• an ITO layer;
• and
• a Distributed Bragg Reflector (DBR) layer;
• wherein two adjacent supports form a cavity with the ITO layer and the deformable reflector, and wherein the height of the cavity is adjusted to change an internal reflection within the cavity.

A method for mapping a spatially resolved pressure, the method comprising:

• forming an array of cavities on a substrate;
• forming a sensitive diaphragm over the array of cavities;
• mapping a plurality of regions of the array and correlating said regions a plurality of identified cavities;
• measuring the movement of each diaphragm against a baseline;
• and
• correlating the measured movement as a function of the diaphragm deflection caused by an external energy source.

A method for changing texture of a device, the method comprising:

• forming an array of cavities on a substrate;
• forming a diaphragm over the array of cavities;
• mapping a plurality of regions of the array and correlating said regions a plurality of identified cavities;
• forming a closed circuit between at least one of the cavities in the array and the diaphragm;
• and
• supplying a bias to the closed circuit, the bias appraised to cause a deflection in the diaphragm thereby changing the texture of the device.