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AssigneeThe Board of Trustees of the Leland Stanford Junior University
InventorsHongie Dai, Liying Jiao
Estimating the term…
Disclosed is a method for making graphene nanoribbons (GNRs) by controlled unzipping of structures such as carbon nanotubes (CNTs) by etching (e.g., argon plasma etching) of nanotubes partly embedded in a polymer film. The GNRs have smooth edges and a narrow width distribution (2-20 nm). Raman spectroscopy and electrical transport measurements reveal the high quality of the GNRs. Such a method of unzipping CNTs with well-defined structures in an array will allow the production of GNRs with controlled widths, edge structures, placement and alignment in a scalable fashion for device integration. GNRs may be formed from nanostructures in a controlled array to form arrays of parallel or overlapping structures. Also disclosed is a method in which the CNTs are in a predetermined pattern that is carried over and transferred to a substrate for forming into a semiconductor device.
A method for producing a graphene nanoribbon by opening a closed carbon nanostructure (“CNS”), comprising the steps of:
A method for producing a graphene nanoribbon device comprising the steps of:
A method of preparing a graphene nanoribbon array, comprising the steps of:
A semiconductor device having a number of transistors thereon, each transistor having a gate, drain and source terminal, wherein the transistors comprise a graphene nanoribbon connecting the source and drain terminals.
Dependencies are inferred from the claim text.