Roll-to-roll digital photolithography
Assignee3M Innovative Properties Company
InventorsMichael A. Haase, Jeffrey H. Tokie, Daniel J. Theis, Brian K. Nelson
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Assignee3M Innovative Properties Company
InventorsMichael A. Haase, Jeffrey H. Tokie, Daniel J. Theis, Brian K. Nelson
Estimating the term…
Methods of making flexible circuit films include providing a polymer film or other flexible substrate having a plurality of alignment marks and a photosensitive material thereon. The substrate passes around a suitable roller, belt, or other inelastic conveyor such that the substrate and the conveyor move together at least from a first location to a second location. Positions of a first set of the alignment marks on a first portion of the substrate are measured when such portion is at the first location, and the measured positions can be used to calculate a distortion of the substrate. The photosensitive material is then patternwise exposed when the first portion of the substrate has moved to the second location. The patternwise exposing is based on the measured positions of the first set of alignment marks, and may include exposing the web with a distortion-adjusted pattern. Related systems and articles are also disclosed.
A method of making a flexible circuit film, comprising:
5-6. (canceled)
(canceled)
A roll-to-roll photolithography system, comprising:
A roll of flexible circuit film, comprising:
(canceled)
Dependencies are inferred from the claim text.