Hot-trap assembly for trapping unreacted gas by- products

A vapor deposition hot-trap device (1) comprising:

• an enclosure (2) comprising at least one inlet (3) and at least one outlet (5);
• at least one heating means (7);
• and
• at least two collector means (10) for the conversion of reaction by-products into products that are deposited on the collector means (10) and/or the inner surface of the enclosure (2), wherein
• the collector means (10) are arranged within the enclosure (2) between the inlet (3) and the outlet (5),
• the collector means (10) have a diameter that substantially matches the diameter of the enclosure (2) and has at least one opening (18),
• the collector means (10) are arranged in a way so that their openings (18) are staggered, and
• the surface area of the collector means (10) increases in the direction from inlet (3) to outlet (5).