Vacuum processing apparatus and vacuum transfer apparatus

A vacuum transfer apparatus formed in a vacuum transfer chamber of a vacuum processing apparatus,

• the vacuum processing apparatus comprising:
• one or more vacuum process chambers, which are formed adjacent to and around a vacuum transfer chamber and have the interior that is maintained at a depressurized state, and where a predetermined process on a target object is performed in a depressurized interior;
• and
• one or more load lock chambers, which are formed adjacent to the transfer chamber and have the interior that is selectively changed to an atmosphere state or a depressurized state to temporarily lock the target object transmitted between an atmosphere space and the vacuum transfer chamber,
• the vacuum transfer apparatus, which receives or delivers the target object between the vacuum transfer chamber and the vacuum process chamber or between the vacuum transfer chamber and the load lock chamber, comprising:
• first and second vacuum transfer robots configured to move inside the vacuum transfer chamber respectively on first and second transfer paths that extend in inner depth directions respectively in a left transfer area and a right transfer area of the vacuum transfer chamber, as viewed from the load lock chamber side,
• wherein the first vacuum transfer robot has access to all the vacuum process chambers adjacent to the left transfer area, at least one of the vacuum process chambers adjacent to the right transfer area, and at least one of the load lock chambers, so as to transfer in or out the target object, and
• the second vacuum transfer robot has access to all the vacuum process chambers adjacent to the right transfer area, at least one of the vacuum process chambers adjacent to the left transfer area, and at least one of the load lock chambers, so as to transfer in or out the target object.