Method and Apparatus for the Formation of an Electronic Device
AssigneePlastic Logic Limited
InventorsDean Baker, Catherine Ramsdale, Martin Lewis
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Abstract
A process of forming an electronic device, by forming the source and drain contacts using photolithography, incorporating a self-assembled monolayer (SAM) over the electrical contacts to form an increased work function of the source and drain electrodes and further forming more favorable charge injection properties or within the channel region to improve film morphology and therefore improve charge transport. The SAM material is added to the photoresist stripper during a step of the photolithography process of forming electrical contacts.
Claims15
A process of forming an electronic device, the electronic device comprising a substrate and a conductive layer, the process comprising:
- removing photoresist from at least one surface of the electronic device using a photoresist stripper mixture, wherein the photoresist stripper mixture comprises a first self-assembled monolayer material and photoresist stripper for dissolving photoresist, thereby depositing a self-assembled monolayer on said at least one surface of said electronic device.
A process of making a photoresist stripper mixture, wherein the photoresist stripper mixture comprises self-assembled monolayer material and further comprises photoresist stripper for dissolving photoresist, the photoresist stripper comprising a glycol component and one or more further components, the process comprising:
- adding the self-assembled monolayer material to the glycol component;
- and then adding to the self-assembled monolayer material and the glycol component the remaining components of the photoresist stripper.
A photoresist stripper mixture comprising:
- a self-assembled monolayer material;
- and
- photoresist stripper for dissolving photoresist.
Dependencies are inferred from the claim text.