US 2011/0235781 A1Published application

X-ray generating apparatus and inspection apparatus using the same therein

OwnerShozo Aoki, Masahiro Nonoguchiinventors

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Abstract

An X-ray generating apparatus is disclosed which includes a tube body having a vacuum interior, an electron source provided within the tube body to generate an electron beam, a target, within the tube body that is irradiated with the electron beam to generate an X-ray, and an X-ray window for taking out the X-ray generated outside of the tube body. A plurality of grooves are formed on a surface of a member building up the target. The grooves each have a fine width and are inclined by a predetermined angle (α), from a direction perpendicular to an elongating direction of the grooves, so that they bridge over the plural numbers of grooves. The X-ray generating apparatus is configured such that a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between the grooves, emits at a predetermined extraction angle (β), passing through the X-ray window. An inspection apparatus which includes the X-ray generating apparatus is also disclosed.

Claims7

Dependent claims

An X-ray generating apparatus, comprising:

a tube body, which is constructed to be vacuum in an inside thereof;
an electron source, which is provided within said tube body to generate an electron beam therefrom;
a target, which is provided within said tube body and irradiated with the electron beam emitting from said electron source, thereby to generate an X-ray therefrom;
and
an X-ray window, which is provided for taking out the X-ray generated into an outside of said tube body, wherein
on a surface of a member building up said target are formed plural numbers of grooves, each having fine width, repetitively, thereby irradiating the electron beam from said electron source, inclining by a predetermined angle, from a direction perpendicular to an elongating direction of said grooves, so that they bridge over said plural numbers of grooves, and also a multi-line X-ray generating from the plural numbers of multi-line targets, which are formed between said grooves, emits at a predetermined extraction angle, passing through said X-ray window.

3 more elements

Dependencies are inferred from the claim text.