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US 2011/0226060 A1Published application
In-plane sensor and method for making same
AssigneePixArt Imaging Incorporation, R.O.C.
InventorsCHUAN WEI WANG, Sheng Ta Lee
Life of this patent
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Abstract
According to the present invention, an in-plane sensor comprises: a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end which is unsupported; and a movable structure including at least one mass body and an extending finger connected to each other; wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.
Claims10
An in-plane sensor, comprising:
- a fixed structure including a fixed finger and a fixed column connected to each other, the fixed finger having a supported end supported by the fixed column and a suspended end;
- and
- a movable structure including at least one mass body and an extending finger connected to each other;
- wherein the supported end of the fixed finger is closer to the mass body than the suspended end is.
1 more element
10-26. (canceled)
Dependencies are inferred from the claim text.