Vibration gyro element, vibration gyro sensor, electronic device, and method of detecting physical quantity of vibration

A vibration gyro element comprising:

• a base section;
• a first detection arm extending from the base section in a first direction;
• a second detection arm extending from the base section in a direction opposite to the extending direction of the first detection arm;
• a first joint section disposed at an end portion of the first detection arm opposite to another end portion near to the base section;
• a second joint section disposed at an end portion of the second detection arm opposite to another end portion near to the base section;
• a first drive arm extending from the first joint section in a second direction intersecting with the first direction in a plan view;
• a second drive arm extending from the first joint section in a direction opposite to the extending direction of the first drive arm;
• a third drive arm extending from the base section in the second direction;
• a fourth drive arm extending from the base section in a direction opposite to the extending direction of the third drive arm;
• a fifth drive arm extending from the second joint section in the second direction;
• and
• a sixth drive arm extending from the second joint section in a direction opposite to the extending direction of the fifth drive arm,
• wherein the first through sixth drive arms are each provided with a set of drive electrodes,
• the first and second detection arms are each provided with a set of detection electrodes,
• the first, second, fifth, and sixth drive arms vibrate in a third direction perpendicular to the first direction and the second direction,
• the third and fourth drive arms vibrate in a direction opposite to the vibrating direction of the first, second, fifth, and sixth drive arms,
• thereby detecting a physical quantity acting around an axis in the first direction.

A method of detecting a physical quantity of a vibration gyro sensor, the method comprising:

• providing a vibration gyro element including a base section, a detection arm extending from the base section in a first direction, a joint section disposed at an end portion of the detection arm opposite to another end portion near to the base section, a first drive arm extending from the joint section in a second direction intersecting with the first direction in a plan view, and a second drive arm extending from the joint section in a direction opposite to the extending direction of the first drive arm;
• vibrating the first drive arm in a third direction perpendicular to the first direction and the second direction;
• vibrating the second drive arm in the same direction as the first drive arm;
• generating a Coriolis force in the first drive arm and the second drive arm in accordance with a physical quantity acting around an axis in the first direction, thereby generating a detection vibration in the second direction in the detection arm;
• and
• detecting the physical quantity based on an electrical signal generated by a migration of a charge due to an electrical field generated by the detection vibration.