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US 2011/0217631 A1Published application
Method of fabricating a halftone mask having a shielding pattern and plural overlapping halftone patterns of different widths
AssigneeLG Display Co., Ltd.
InventorJi No LEE
Life of this patent
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Abstract
A halftone mask includes a shielding pattern partially formed on a transparent substrate; a first halftone transmission pattern partially formed on the transparent substrate; and a second halftone transmission pattern formed on the first halftone transmission layer.
Claims9
A method of fabricating a halftone mask, comprising the steps of:
- forming shielding patterns on a transparent substrate;
- forming a first halftone transmission pattern on the transparent substrate between the shielding patterns;
- and
- forming a second halftone transmission pattern on the first halftone transmission pattern,
- wherein a width of the second halftone transmission pattern is narrower than a width of the first halftone transmission pattern,
- wherein the shielding patterns are in contact with a border of the first halftone transmission pattern;
- and
- wherein a portion of the first halftone transmission pattern at a gap which is present in between the shielding pattern and the second halftone transmission pattern, is uncovered by the second halftone transmission pattern.
5 more elements
Dependencies are inferred from the claim text.