Low-Defect nitride boules and associated methods
AssigneeTeleolux Inc.
InventorMichael Joseph Callahan
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Abstract
This invention describes Extreme low-defect Nitride Boules and associated methods of manufacture using low-defect seed templates or composite templates arranged in precise hexagonal or partial hexagonal crystal facets, and nearly exact lattice and thermal expansion coefficient matching of a low-defect nitride template or composite template with a thick nitride boule grown upon said template or composite template through alloying and doping. Reduction of the critical thickness of said template or composite template and said boule by thinning of template or composite template is also described.
Claims20
Metal nitride single crystal boule grown by HVPE techniques of the geometrical form of a cylinder, a hexagonal prism, or partial hexagonal prism wherein:
- a. the thickness of the boule is greater than 1 cm in length
- b. the surface area of the largest plane of the boule is greater than 20 cm2
- c. the dislocation density of the boule is less than 108 per cm3
- d. the boule is substantially free of grain boundaries and other planar defects
A method for making thick low-defect large-surface-area metal nitride boules which comprises the following steps of:
- a. Providing a low-defect metal nitride template
- b. Using a vapor phase growth or solution phase growth method to grow a thick low-defect metal nitride boule on said metal nitride template wherein at least one of the metal nitride template or the metal nitride boule is doped or alloyed to obtain nearly exact lattice matching and thermal expansion matching of the metal nitride template with the metal nitride boule during growth of the metal nitride boule
A method to remove a low defect metal nitride film from a template wherein:
- a. A form of electromagnetic radiation is mostly transparent to one of the film or template and is absorbed to the other.
- b. The electromagnetic radiation is passed through whichever the film or template it is transparent to
- c. The electromagnetic radiation is absorbed in whichever the film or template it is not transparent to
- d. The absorption of the electromagnetic radiation causes a portion of the film and template to separate
- e. The film is thin enough to have the partial separation cause mostly elastic deformation until full separation is completed
Dependencies are inferred from the claim text.