Method and apparatus for transcripting fine patterns

A method for transcripting fine patterns, comprising the steps of:

• applying resist to both sides of a substrate;
• transcripting patterns on the both sides of the substrate by pressing two stampers that make a pair with fine patterns formed therein against the both sides of the substrate;
• and
• sequentially breaking the two stampers pressed against the both sides of the substrate away from the substrate after the resist with the patterns transcripted thereto is cured,
• wherein the step of transcripting the patterns further includes the steps of:
• deforming the two stampers into convex shapes, and pressing the two deformed stampers against the substrate;
• pressing the two stampers against both side of the substrate, and releasing convex shape deformation of the stampers;
• exposing the resist applied to the both sides of the substrate with UV light while the two stampers are pressed against the both sides of the substrate thereby transcripting the patterns formed in the two stampers to the resist applied to the both sides of the substrate.

An apparatus for transcripting fine patterns comprising:

• a resist application unit which applies resist to both sides of a substrate;
• a exposure unit which presses two stampers that make a pair with fine patterns formed therein against the both sides of the substrate with resist applied to the both sides thereof by the resist application unit and exposes the resist applied to the both sides of the substrate with light and thereby transcripts the patterns formed in the two stampers to the resist;
• a substrate unloading unit which breaks the substrate away from one of the two stampers pressed against the both sides of the substrate with the patterns transcripted to the both sides thereof and unloading the substrate from the exposure unit together with the other of the two stampers;
• and
• a breakaway unit which receives the substrate unloaded from the exposure unit by the substrate unloading unit and breaks the substrate away from the other stamper,
• wherein the exposure unit includes:
• two stamper deforming means that make a pair respectively deforming the two stampers into a convex shape and releasing the convex shape deformation;
• two stamper driving means that make a pair respectively advancing or retreating the two stampers in a direction perpendicular to the both sides of the substrate with the resist applied to the both sides thereof;
• and
• two exposure means which exposes the both sides of the substrate with the resist applied to the both sides thereof with UV light emitted from LEDs passed through each of the two stampers pressed against the both sides of the substrate by the two stamper driving means.