Semiconductor laser device and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsMaki SUGAI, Shinji SAITO, Rei HASHIMOTO, Yasushi HATTORI, Jongil HWANG, Masaki TOHYAMA, Shinya NUNOUE
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AssigneeKabushiki Kaisha Toshiba
InventorsMaki SUGAI, Shinji SAITO, Rei HASHIMOTO, Yasushi HATTORI, Jongil HWANG, Masaki TOHYAMA, Shinya NUNOUE
Estimating the term…
Embodiments describe a semiconductor laser device driven at low voltage and which is excellent for cleavage and a method of manufacturing the device. In one embodiment, the semiconductor laser device includes a GaN substrate; a semiconductor layer formed on the GaN substrate; a ridge formed in the semiconductor layer; a recess formed in the bottom surface of the GaN substrate. The recess has a depth less than the thickness of the GaN substrate. The device also has a notch deeper than the recess formed on a side surface of the GaN substrate and separated from the recess. In the semiconductor laser device, the total thickness of the GaN substrate and the semiconductor layer is 100 μm or more, and the distance between the top surface of the ridge and the bottom surface of the recess is 5 μm or more and 50 μm or less.
A semiconductor laser device comprising:
A method of manufacturing a semiconductor laser device, comprising:
Dependencies are inferred from the claim text.