Semiconductor inspection device and inspection method

A semiconductor inspection apparatus comprising:

• an inspection stage holding a semiconductor device in a zero-bias state to be an inspection object;
• a laser light source irradiating the semiconductor device with pulsed laser light as inspection light;
• an inspection light guide optical system guiding the inspection light from the laser light source to the semiconductor device, and including scanning means that controls an optical path of the inspection light for two-dimensionally scanning by the inspection light within an inspection range set for the semiconductor device;
• a solid immersion lens, disposed between the semiconductor device and the inspection light guide optical system, and condensing the inspection light while irradiating the semiconductor device with the inspection light from the inspection light guide optical system;
• electromagnetic wave detection means detecting an electromagnetic wave generated in the semiconductor device by irradiation of the inspection light, and emitted via the solid immersion lens;
• and
• inspection control means controlling inspection of the semiconductor device, wherein
• the inspection control means includes:
• inspection range setting means setting, for the semiconductor device, with reference to layout information thereof, the inspection range that needs to be two-dimensionally scanned by the inspection light via the solid immersion lens;
• position control means controlling, with reference to the layout information of the semiconductor device, a position of the semiconductor device with respect to the inspection light guide optical system to arrange the inspection range at a predetermined position with respect to an optical axis;
• and
• scanning control means controlling driving of the scanning means to control two-dimensional scanning by the inspection light via the solid immersion lens within the inspection range of the semiconductor device.