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US 2011/0215503 A1Published application
Reducing Adhesion between a Conformable Region and a Mold
AssigneeMolecular Imprints, Inc.
InventorsFrank Y. Xu, Michael N. Miller
Life of this patent
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Abstract
Improved preferential adhesion and release characteristics are described with respect to a substrate and a mold having imprinting material disposed therebetween, in the absence of an a priori release layer on the mold. The imprinting material is a polymerizable material including a fluorinated surfactant and a photoinitiator. The surfactant includes —CH2CH2CH2O—, —CH(CH3)CH2O—, —OCH(CH3)CH2—, —CH(CH3)CH(CH3)O—, or a combination thereof.
Claims17
An imprint lithography method comprising:
- locating an imprinting material between an imprint lithography mold and an imprint lithography substrate, wherein:
- the imprinting material is a polymerizable composition comprising a fluorinated surfactant,
- the surfactant comprises —CH2CH2CH2O—, —CH(CH3)CH2O—, —OCH(CH3)CH2—, —CH(CH3)CH(CH3)O—, or a combination thereof, and
- the imprint lithography mold does not have an a priori release layer,
- contacting the imprinting material with the imprint lithography mold;
- solidifying the imprinting material between the imprint lithography mold and the imprint lithography substrate to form a solidified imprinting layer between the imprint lithography mold and the imprint lithography substrate;
- and
- separating the imprint lithography mold from the solidified imprinting layer, thereby leaving the solidified imprinting layer adhered to the imprint lithography substrate.
5 more elements
A imprint lithography mold assembly comprising:
- an imprint lithography mold,
- an imprint lithography substrate;
- and
- an imprinting material disposed between and in contact with the imprint lithography mold and the imprint lithography substrate,
- wherein:
- the imprinting material is a polymerizable composition comprising a fluorinated surfactant,
- the surfactant comprises —CH2CH2CH2O—, —CH(CH3)CH2O—, —OCH(CH3)CH2—, —CH(CH3)CH(CH3)O—, or a combination thereof, and
- the imprint lithography mold does not have an a priori release layer,
- solidifying the imprinting material between the imprint lithography mold and the imprint lithography substrate to form a solidified imprinting layer adhered to the imprint lithography substrate;
- and
- separating the imprint lithography mold from the solidified imprinting layer such that the solidified imprinting layer remains adhered to the substrate.
8 more elements
An imprinting material comprising;
- one or more polymerizable components;
- a fluorinated surfactant comprising —CH2CH2CH2O—, —CH(CH3)CH2O—, —OCH(CH3)CH2—, —CH(CH3)CH(CH3)O—, or a combination thereof;
- and
- a photoinitiator.
1 more element
Dependencies are inferred from the claim text.