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US 2011/0214700 A1Published application
Apparatus for ejecting fluid onto a substrate and system and method of incorporating the same
AssigneeAkrion Systems, LLC
InventorsChristopher Hahn, Hanjoo Lee
Life of this patent
Estimating the term…
Abstract
A fluid dispenser for use in the processing of substrates. The dispenser has a dome shaped body with a convex upper surface and has a number of conduits designed to supply fluid to the surface of a substrate at predetermined points.
Claims2
A method of processing a substrate comprising:
- supporting a substrate in a horizontal orientation;
- rotating the substrate;
- providing a fluid dispensing apparatus adjacent a surface of the substrate, the fluid dispensing apparatus comprising a body with a substantially dome-shaped outer surface and a plurality of conduits terminating as holes in the outer surface of the body, wherein the conduits are adapted to dispense fluid out of the holes;
- and
- applying fluid to the surface of the substrate via the fluid dispensing apparatus.
2 more elements
A method of processing a substrate comprising:
- supporting a substrate in a horizontal orientation;
- rotating the substrate;
- providing a fluid dispensing apparatus adjacent a surface of the substrate, the fluid dispensing apparatus comprising a body having a first header and a second header, a first inlet for introducing a first fluid into the first header, a second inlet for introducing a second fluid into the second header, a first array of conduits extending from the first header and terminating as holes in an outer surface of the body, the first array of conduits adapted to eject the first fluid, a second array of conduits extending from the second header and terminating as holes in the outer surface of the body, the second array of conduits adapted to eject the second fluid;
- applying a first fluid to the surface of the substrate via the first array of conduits of the fluid dispensing apparatus;
- and
- applying a second fluid to the surface of the substrate via the second array of conduits of the fluid dispensing apparatus.
3 more elements
Dependencies are inferred from the claim text.