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US 2011/0212613 A1Published application
Semiconductor devices having a fuse and methods of cutting a fuse
OwnerJeong-Kyu Kim, Kun-Gu Leeinventors
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Abstract
A semiconductor device and methods of cutting a fuse of a semiconductor device are provided, the semiconductor device includes a semiconductor substrate that includes a fuse region, a plurality of fuse patterns disposed in the fuse region of the semiconductor substrate, and an insulating layer that insulates the fuse patterns from the semiconductor substrate. The fuse patterns each include a fuse. The fuse patterns are linked to the semiconductor substrate.
Claims13
1-12. (canceled)
A method of cutting a fuse of a semiconductor device, comprising:
- forming a first interlayer insulating layer on a semiconductor substrate;
- forming a plurality of fuse patterns on the first interlayer insulating layer, wherein each of the fuse patterns includes a fuse connected to the semiconductor substrate;
- forming a second interlayer insulating layer on the fuse patterns, wherein the second interlayer insulating layer includes a plurality fuse openings that each correspond to one of the fuse patterns, the fuse openings exposing the fuse in the corresponding fuse pattern;
- and
- cutting one of the fuses by irradiating laser beams through the corresponding fuse opening, when the plurality of fuse patterns is connected to the semiconductor substrate.
2 more elements
A method of cutting a fuse of a semiconductor device, comprising:
- forming a semiconductor substrate that includes a fuse region;
- forming a plurality of fuse patterns in the fuse region of the semiconductor substrate, each of the fuse patterns includes a fuse;
- forming an interlayer insulating layer that insulates the plurality of fuse patterns from the semiconductor substrate;
- and
- cutting one of the fuses by irradiating laser beams through the corresponding fuse opening, when the plurality of fuse patterns are connected to the semiconductor substrate.
2 more elements
Dependencies are inferred from the claim text.