US 2011/0211190 A1 · MIRROR STRUCTURE

Abstract

A mirror structure is provided in which at least a portion of a wavefront sensor is integrated with a mirror. In particular, a mirror structure is provided in which a Hartmann mask or a microlens array of a Shack-Hartmann wavefront sensor is integrated with a mirror to provide a very compact wavefront detector/corrector in a single device. Such a mirror structure may be used with a tip-tilt stage in a laser cavity to provide much simplified adaptive optics in the cavity. Furthermore, a Hartmann Mask may be integrated with self deforming mirror comprising an active PZT layer bonded to a passive mirror substrate, wherein the Hartmann Mask comprises an array of apertures formed through the active PZT layer.

Claims22

Dependent claims

A mirror structure, comprising a mirror having a reflective surface arranged to allow a portion of incident light to pass therethrough and wherein the mirror structure has at least one component of an optical sensor integrated therewith, arranged to receive light that passes through said reflective surface, wherein the at least one component of the optical sensor is an optical detector arranged to detect a wavefront slope of the incident light at one or more points across the aperture of the mirror,

and wherein a Fourier lens is disposed between the reflective surface and the optical detector, arranged to focus an incident beam of light, sampled from an incident wavefront, onto the optical detector at a position indicative of the wavefront slope.

Dependencies are inferred from the claim text.

Mirror structure

Life of this patent

Mirror structure

Life of this patent

Abstract

Claims22