Seed light generation device, light source device, adjustment method thereof, light irradiation device, exposure device, and device manufacturing method

A light source device, comprising:

• a seed light generation device which generates seed light to be optically amplified;
• a light amplification unit which optically amplifies the seed light generated by the seed light generation device;
• and
• a wavelength conversion unit which converts a wavelength of the light optically amplified by the light amplification unit, and outputs ultraviolet pulsed light,
• the seed light generation device including:
• a pulse generation unit which generates pulsed light having a single wavelength;
• a pulse modulation unit which selectively passes and extracts a part of the pulsed light;
• and
• a timing adjustment unit which adjusts a spectral width of the ultraviolet pulsed light to be output from the wavelength conversion unit by relatively adjusting the extracting timing of the pulsed light by the pulse modulation unit during the generation period of the pulsed light by the pulse generation unit, according to an operation.