Temperature-controlled holding devices for planar articles

A reticle chuck, comprising:

• a chuck body including a planar chuck surface that receives and contacts a planar reverse surface of a planar reticle;
• a wall having a first surface being the planar chuck surface and a second surface located depthwise in the chuck body;
• a chuck-cooling device comprising at least one channel situated within the chuck body, the at least one channel circulating a coolant fluid as the coolant fluid contacts the second surface of the wall;
• and
• a first electrode associated with the chuck surface, the first electrode being electrically energizable on demand to produce an electrostatic force attractively holding the reticle to the chuck surface.

An EUVL system, comprising:

• an illumination-optical system;
• an imaging-optical system;
• a movable reticle stage situated between the illumination-optical system and imaging-optical system;
• a reticle chuck mounted to and moved by the reticle stage, the reticle chuck comprising a chuck body and a wall, the wall defining a planar reticle-contact surface and a reverse surface, the reticle-contact surface receiving a planar reverse surface of a planar reflective reticle;
• and
• at least one cooling channel defined within the chuck body and separated from the reticle-contact surface by the wall, the at least one cooling channel delivering flow of a coolant fluid on the reverse surface of the wall, the flow being sufficient to remove heat from the wall and thus from the reticle.

A method for holding a planar reticle in a lithography system, the reticle comprising a planar reverse surface, the method comprising:

• presenting the planar reverse surface of the reticle to a planar reticle-contact surface of a reticle chuck;
• electrostatically attracting the reverse surface of the reticle to the reticle-contact surface such that the reticle is held on the reticle-contact surface at a chuck-reticle interface;
• circulating a coolant fluid in the reticle chuck to urge conduction of heat from the reticle to the fluid as the reticle is being held on the reticle-contact surface;
• and
• removing heat, absorbed from the reticle by the coolant fluid, from the coolant fluid.

A method for controlling planarity of a movable, thermally conductive article, comprising:

• providing a movable body with a planar article-contact surface;
• separating the planar article-contact surface from a hydraulic channel extending in the movable body;
• placing the article on the article-contact surface such that a reverse surface of the article contacts the article-contact surface, an obverse surface of the article faces away from the article-contact surface, and thermal conduction is established between the article-contact surface and the reverse surface;
• producing a force attracting the article to the article-contact surface;
• controllably moving the article by correspondingly moving the body;
• and
• actively cooling the reverse surface to remove heat from the body and hence from the article.