Switch with increased magnetic sensitivity
AssigneesSTMicroelectronics Asia Pacific Pte Ltd, Institute of Microelectronics
InventorsTang Min, Olivier Le Neel, Ravi Shankar
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AssigneesSTMicroelectronics Asia Pacific Pte Ltd, Institute of Microelectronics
InventorsTang Min, Olivier Le Neel, Ravi Shankar
Estimating the term…
Switches that are actuated through exposure to a magnetic field are described. Such switches include conductive portions that are electrically separate from one another when in an open switch configuration. A mobile element of a switch includes one or more anchoring members that are in electrical contact with one of the conductive portions. The mobile element also has a beam that is attached to the one or more anchoring members. The beam can be attached to the one or more anchoring members by flexures. In some cases, the beam includes a plurality of strips. The beam has an end portion that is configured to move toward the other conductive portion when exposed to an external force, such as a magnetic field. When the mobile element electrically contacts the other conductive portion of the substrate, an electrical pathway is established between the conductive portions, giving rise to a closed switch configuration. Various configurations of anchoring members may significantly decrease initial upward beam deformation upon manufacture of the mobile element, resulting in an increased sensitivity upon exposure to a magnetic field. Methods for manufacturing switches that exhibit increased sensitivity to magnetic fields are also disclosed. Switches described can be formed using semiconductor manufacturing techniques. Methods described also include forming a beam that is attached to one or more anchoring members where an end portion of the beam moves in a substantially downward direction upon exposure to a magnetic field of sufficient intensity.
A switch comprising:
A method of manufacturing a switch, the method comprising:
A switch comprising:
A switch comprising:
A method of manufacturing a switch, the method comprising:
Dependencies are inferred from the claim text.