Resin multilayer device and method for manufacturing same

A manufacturing method of a resin multilayer device having a balun, comprising the steps of:

• forming a GND layer on a wafer to be a substrate, coating a fluid resin on the GND layer, and curing the fluid resin to form a first resin layer;
• providing a first balanced signal transmission line and a second balanced signal transmission line that are formed electrically independently on the first resin layer;
• coating a fluid resin on the first resin layer and the first and second balanced signal transmission lines, and curing the fluid resin to form a second resin layer;
• providing an unbalanced signal transmission line on the second resin layer so as to be opposed to the first and second balanced signal transmission lines;
• and
• forming a third resin layer on the second resin layer and the unbalanced signal transmission line.

A manufacturing method of a resin multilayer device having a balun, comprising the steps of:

• forming a GND layer on a wafer to be a substrate, and spreading a photosensitive resin on the GND layer to form a first resin layer;
• forming a recess portion in an upper portion of the first resin layer by photolithography;
• forming a seed layer on the first resin layer by sputtering;
• forming a resist on a portion of the seed layer outside the recess portion;
• forming a lower interconnection line in the recess portion by a plating treatment;
• removing the resist;
• removing the seed layer by etching;
• forming a second resin layer on the first resin layer;
• forming an upper interconnection line on the second resin layer;
• and
• forming a third resin layer on the second resin layer.

A manufacturing method of a resin multilayer device having a balun, comprising the steps of:

• coating a fluid resin on a wafer to be a substrate, and curing the fluid resin to form a first resin layer;
• providing a first balanced signal transmission line and a second balanced signal transmission line that are formed electrically independently on the first resin layer;
• coating a fluid resin on the first resin layer and the first and second balanced signal transmission lines, and curing the fluid resin to form a second resin layer;
• providing an unbalanced signal transmission line on the second resin layer so as to be opposed to the first and second balanced signal transmission lines;
• and
• forming a third resin layer on the second resin layer and the unbalanced signal transmission line.