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US 2011/0210259 A1Published application
Micro-channel plate detector
AssigneeUchicago Argonne, LLC
InventorsJeffrey W. Elam, Hsien-Hau Wang, Michael J. Pellin, Karen Byrum, Henry J. Frisch, Seon W. Lee
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Abstract
A method and system for providing a micro-channel plate detector. An anodized aluminum oxide membrane is provided and includes a plurality of nanopores which have an Al coating and a thin layer of an emissive oxide material responsive to incident radiation, thereby providing a plurality of radiation sensitive channels for the micro-channel plate detector.
Claims20
A micro-channel plate detector, comprising:
- an anodized aluminum oxide membrane having a plurality of nanopores therethrough;
- and
- a thin layer disposed within at least a portion of the plurality of nanopores and the nanopores being open and unplugged, the thin layer being a continuous layer of conductive and emissive oxide material responsive to incident radiation, thereby providing a plurality of radiation sensitive channels for the micro-channel plate detector.
A method of preparing a micro-channel plate detector, comprising the steps of:
- preparing an anodized aluminum oxide membrane having a plurality of nanopores extending therethrough;
- depositing an Al layer on the anodized aluminum oxide membrane;
- and
- depositing a thin, continuous layer of an emissive oxide on the Al layer, including the nanopores, by atomic layer deposition.
1 more element
Dependencies are inferred from the claim text.