Take-Up Vacuum Processing Apparatus

Abstract

[Object] To provide a take-up vacuum processing apparatus that prevents breakage due to heat generation and occurrence of dielectric breakdown and is suitable for life extension. [Solving Means] An RF electrode (6) is arranged in a vacuum chamber (15). Therefore, for example, compared to the case where a rotation introduction unit such as a capacitor coupling is arranged in an atmospheric pressure, the occurrence of dielectric breakdown between a roller electrode (18) and the RF electrode (6) can be prevented if the inside of the vacuum chamber (15) is maintained in a predetermined degree of vacuum. Further, there are caused no problems of breakage due to heat generation in a conventional rotation introduction unit such as a rotary connector. Since the RF electrode (6) is arranged in a gap away from the roller electrode (18), in other words, an alternating-current voltage is applied to the roller electrode (18) in a noncontact manner, wear due to contact is not caused and the life extension of the electrodes can be achieved.

Dependencies are inferred from the claim text.