Vacuum processing chamber manufactured by aluminum casting
AssigneeOerlikon Solar AG, Trubbach
InventorsEduard Ilinich, Eugenio De Biasio, Damian Ehrensperger
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Abstract
The present invention provides a method for manufacturing a vacuum processing chamber comprising a volume which is defined by a wall and which can be evacuated, said wall being made of aluminum by casting, said wall comprising an outer face and an inner face, said inner face faces the volume, and a method for improving the inner face of the wall of a vacuum processing chamber, wherein the inner face of said wall is smoothened by grinding and is subsequently pearl-blasted or shot-blasted. Vacuum processing chambers obtained by said methods are provided too.
Claims13
A method for manufacturing a vacuum processing chamber comprising a volume which is defined by a wall and which can be evacuated, said wall being made of aluminum by casting, said wall comprising an outer face and an inner face, said inner face faces the volume, wherein the inner face of said wall is smoothened by grinding, and is subsequently pearl-blasted or shot-blasted.
A vacuum processing chamber comprising a volume defined by a wall and which can be evacuated, said wall comprising an inner face which faces the volume, and an outer face, wherein the inner face of the wall has been smoothened by grinding, and shot-blasted or pearl-blasted thereafter.
Dependencies are inferred from the claim text.