Trioka Acid Semiconductor Cleaning Compositions and Methods of Use

Abstract

Semiconductor processing compositions for use with silicon wafers having an insulating layers and metalization layers on the wafers comprising water and one or more Troika acids which is also referred to as α,α-disubstituted trifunctional oximes or α-(Hydroxyimino) Phosphonoacetic acids, their salts, and their derivatives.

Dependencies are inferred from the claim text.