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US 2011/0086164 A1Published application
Apparatus and method for solution coating thin layers
AssigneeE. I. Du Pont de Nemours and Company
InventorsCharles D. Lang, Tami Janene Faircloth
Life of this patent
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Abstract
An apparatus and method for solution coating layers onto a substrate of an electronic device. A slot die coater in conjunction with a vacuum assist device is used in priming, coating and cleaning stations to produce thin layers having performance advantages over competing technologies.
Claims10
An apparatus for solution coating a substrate, the apparatus comprising:
- a slot die coater;
- a vacuum assist device;
- and
- sealing elements wherein the vacuum assist device is located on the upstream portion of the slot die coater to form a coater assembly, and the sealing elements are associated with the coater assembly.
1 more element
A method for solution coating a substrate, the method comprising:
- loading the solution into a slot die coater, the slot die coater located adjacent a vacuum assist device to form a coater assembly;
- establishing a first distance between an edge of the slot die coater and a top surface of a priming roll;
- loading the substrate onto a chuck;
- establishing a second distance between the edge of the slot die coater and a top surface of the substrate;
- priming the slot die coater by sending the solution out the slot die coater onto the priming roll;
- positioning the slot die coater at the second distance above the substrate;
- coating the substrate with the solution from the slot die coater;
- and
- terminating the flow of solution to the substrate.
6 more elements
Dependencies are inferred from the claim text.