Substrate cooling apparatus, substrate cooling method, and storage medium

A substrate cooling method, comprising the steps of

• mounting a substrate on a mounting surface of a mounting table;
• supporting the substrate on a projection provided on the mounting surface;
• passing a coolant through a coolant path provided in the mounting table to cool the mounting surface;
• discharging a cooling gas for cooling the substrate from a plurality of gas discharge ports provided in a circumferential direction at a peripheral edge portion of the mounting surface;
• sucking the cooling gas through a gas suction port provided at a center portion of the mounting surface;
• and
• diffusing the cooling gas in a circumferential direction of the substrate by a groove provided in the mounting surface.

A storage medium storing a computer program used in a substrate cooling apparatus,

• wherein said computer program is for implementing a substrate cooling method,
• said substrate cooling method comprising the steps of:
• mounting a substrate on a mounting surface of a mounting table;
• supporting the substrate on a projection provided on the mounting surface;
• passing a coolant through a coolant path provided in the mounting table to cool the mounting surface;
• discharging a cooling gas for cooling the substrate from a plurality of gas discharge ports provided in a circumferential direction at a peripheral edge portion of the mounting surface;
• sucking the cooling gas through a gas suction port provided at a center portion of the mounting surface;
• and
• diffusing the cooling gas in a circumferential direction of the substrate by a groove provided in the mounting surface.