Vibration control apparatus, vibration control method, exposure apparatus, and device manufacturing method
OwnerHideaki Nishino, Hiroshi Shirasuinventors
Life of this patent
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Abstract
A vibration control apparatus suppresses a vibration of a structure which is vibrated. The vibration control apparatus includes: a vibration isolation apparatus that supports the structure and suppresses a transmission of a vibration to the structure, the vibration having an amplitude equal to or less than a first amplitude in a predetermined direction; and a damping apparatus that damps a vibration of the structure vibrating in the predetermined vibration direction with a second amplitude larger than the first amplitude, to thereby reduce the vibration to equal to or less than the first amplitude.
Claims23
A vibration control apparatus that controls a vibration of a structure, comprising:
- a vibration isolation apparatus that supports the structure and suppresses a transmission of a vibration to the structure, the vibration having an amplitude equal to or less than a first amplitude in a predetermined direction;
- and
- a damping apparatus that damps a vibration of the structure vibrating in the predetermined vibration direction with a second amplitude larger than the first amplitude, to thereby reduce the vibration to equal to or less than the first amplitude.
A vibration control method of controlling a vibration of a structure, the method comprising:
- supporting the structure, and also suppressing transmission of a vibration with an amplitude equal to or less than a first amplitude in a predetermined vibration direction to the structure;
- and
- damping a vibration of the structure that is vibrated with a second amplitude larger than the first amplitude in the vibration direction to a vibration with an amplitude equal to or less than the first amplitude.
Dependencies are inferred from the claim text.