Current divider resistance imaging of an electrical device using an atomic force probe
AssigneeInternational Business Machines Corporation
InventorsDavid E. Albert, Kari Satorius
Life of this patent
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Abstract
A method of analyzing an electronic device includes grounding a first end of an electrical structure, grounding a second end of the electrical structure, contacting an atomic force probe (AFP) to the electrical structure between the first and second ends, shifting the AFP across the electrical structure between the first and second ends, measuring an electrical property of the electrical structure at one of the first and second ends, and creating an image of the electrical structure based on the electrical property.
Claims17
A method of analyzing an electronic device, the method comprising:
- grounding a first end of an electrical structure;
- grounding a second end of the electrical structure;
- contacting an atomic force probe (AFP) with a constant current force and or constant voltage to the electrical structure between the first and second ends;
- shifting the AFP across the electrical structure between the first and second ends;
- measuring an electrical property of the electrical structure at one of the first and second ends;
- and
- creating an image of the electrical structure based on the electrical property.
A system for analyzing resistance of an electrical structure, the system comprising:
- a central processing unit (CPU), said CPU being interconnected functionally via a system bus to:
- an atomic force prober (AFP)
- an input/output (I/O) adapter connecting to at least one of a removable data storage device, a program storage device, and a mass data storage device;
- a display adapter connecting to a display device;
- and
- at least one memory device thereupon stored a set of instructions which, when executed by said CPU, causes said system to:
- shift the AFP across an electrical structure between a first end and second end;
- measure an electrical property of the electrical structure at one of the first and second ends;
- and
- create an image of the electrical structure based on the electrical property.
A computer program product comprising:
- a computer useable medium including a computer readable program, wherein the computer readable program when executed on a computer causes the computer to:
- shift an atomic force prober (AFP) across an electrical structure between a first end and second end;
- measure an electrical property of the electrical structure at one of the first and second ends;
- and
- create an image of the electrical structure based on the electrical property.
Dependencies are inferred from the claim text.