Wafer storage container

A wafer storage container comprising:

• a container body having an opening adapted to store wafers, the container body comprising a window and wafer support parts;
• delivery components attached to the exterior face part of the container body, the delivery components comprising a bottom plate disposed at a bottom of the container body, a pair of side handles disposed at both sides of the container body, and a robotic flange disposed at a top of the container body,-and card case components optionally disposed at a backside wall of the container body;
• and
• a lid adapted to seal the opening of the container body, the lid comprising a lid main body, a pair of latch mechanism disposed on the lid main body, a retainer member disposed at an inner surface of the lid main body, a seal gasket member disposed at a periphery of the lid main body such that it contacts a periphery of an opening part of the container body, and a lid cover,
• wherein the container body and the lid main body are formed of liquid crystal polymer, the robotic flange, the side handles, the bottom plate and the lid cover are formed of PEI, the card components are formed of polycarbonate, the latch mechanism and the retainer member are formed of PEEK, and the seal gasket member is formed of elastomeric resin.

A wafer storage container comprising:

• a container body having an opening adapted to store wafers, the container body comprising a window and wafer support parts;
• delivery components attached to the exterior face part of the container body, the delivery components comprising a bottom plate disposed at a bottom of the container body, a pair of side handles disposed at both sides of the container body, and a robotic flange disposed at a top of the container body and card case components optionally disposed at a backside wall of the container body;
• and
• a lid adapted to seal the opening of the container body, the lid body comprising a lid main body, a pair of latch mechanism disposed within the lid main body, a retainer member disposed at an inner surface of the lid main body, a seal gasket member disposed at a periphery of the lid main body such that it contacts a periphery of an opening part of the container body, and a lid cover,
• wherein the container body, the bottom plate, the robotic flange, the lid main body, and the lid cover are formed of PEI, the latch mechanism and the retainer are formed of PEEK, the seal gasket member is formed of thermoplastic elastomer.