Temperature control method and temperature control system for substrate mounting table
AssigneeTokyo Electron Limited
InventorYasuharu Sasaki
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Abstract
There is provided a temperature control method for a substrate mounting table capable of increasing a temperature of a substrate rapidly and reducing a loss of thermal energy. In a susceptor 12 including therein a heater 14, a coolant path 15 and a coolant reservoir 16 and holding thereon a wafer W on which a plasma etching process is performed, a coolant flows through the inside of the coolant path 15 and the coolant reservoir 16, and a flow of the coolant is stopped in the coolant reservoir 16 when the heater 14 generates heat.
Claims12
A temperature control method for a substrate mounting table mounting thereon a processing target substrate and having therein a heating unit and a coolant path through which a coolant is circulated, the method comprising:
- stopping a flow of the coolant when the heating unit generates heat.
A temperature control system for a substrate mounting table mounting thereon a processing target substrate and having therein a heating unit, a coolant path and a coolant reservoir communicating with the coolant path,
- wherein the mounting surface, the heating unit and the coolant reservoir are arranged in this sequence from the top of the substrate mounting table,
- a coolant flows through the coolant path and the coolant reservoir, and
- the temperature control system comprises:
- a gas layer forming device that forms a gas layer in an upper region of the coolant reservoir by introducing a gas into the coolant reservoir when the heating unit generates heat and a flow of the coolant is stopped.
A temperature control system for a substrate mounting table mounting thereon a processing target substrate and having therein a heating unit, a coolant path and a coolant reservoir communicating with the coolant path,
- wherein the mounting surface, the heating unit and the coolant reservoir are arranged in this sequence from the top of the substrate mounting table,
- a coolant flows through the coolant path and the coolant reservoir, and
- the temperature control system comprises:
- a heat insulating layer forming device that forms a heat insulating layer in an upper region of the coolant reservoir by introducing a multiple number of heat insulating particles into the coolant reservoir when the heating unit generates heat and a flow of the coolant is stopped.
Dependencies are inferred from the claim text.