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US 2011/0033973 A1Published application
Deposition apparatus for temperature sensitive materials
AssigneeGlobal OLED Technology LLC
InventorsRonald S. Cok, Michael Long
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AssigneeGlobal OLED Technology LLC
InventorsRonald S. Cok, Michael Long
Estimating the term…
A system for the deposition of vaporized materials on a substrate is described, comprising at least first and second orientation-independent apparatuses for directing vaporized organic materials onto a substrate surface to form first and second films, each of the first and second orientation-independent apparatuses being arranged in a different relative orientation and comprising: a chamber containing a quantity of material; a permeable member at one end of the chamber with a heating element for vaporizing the material; and means for continuously feeding the material toward the permeable member as it is vaporized, whereby organic material vaporizes at a desired rate-dependent vaporization temperature at the one end of the chamber. A plurality of thin films may be deposited on a substrate using deposition apparatus in a variety of orientations. Such a design provides reduced costs and improved deposition rate control.
A system for the deposition of vaporized materials on a substrate, comprising at least first and second orientation-independent apparatuses for directing vaporized organic materials onto a substrate surface to form first and second films, each of the first and second orientation-independent apparatuses being arranged in a different relative orientation and comprising:
A method of depositing thin-films on a substrate comprising the steps of:
An orientation-independent apparatus for vaporizing and depositing organic materials onto a substrate surface to form a film, comprising:
Dependencies are inferred from the claim text.