Fin anti-fuse with reduced programming voltage

An anti-fuse structure comprising:

• a substrate having an upper surface;
• a plurality of parallel conductive fins positioned on said upper surface of said substrate, each of said fins having a rectangular prism shape comprising:
• a length dimension parallel to said upper surface;
• a height dimension perpendicular to said length dimension;
• and
• a width dimension perpendicular to said length dimension and to said height dimension, said length dimension being greater than said height dimension, and said height dimension being greater than said width dimension, said width dimension contacting said upper surface of said substrate, and said length dimension of said fins having a first end and a second end;
• an insulator covering said first end of said fins;
• a first electrical conductor positioned on said insulator, said first electrical conductor being electrically insulated from said first end of said fins by said insulator;
• and
• a second electrical conductor electrically connected to said second end of said fins,
• said insulator having a thickness sufficient to break down on the application of a predetermined voltage between said second electrical conductor and said first electrical conductor and thereby form an uninterrupted electrical connection between said second electrical conductor and said first electrical conductor through said fins.

An anti-fuse structure comprising:

• a substrate having an upper surface;
• a plurality of parallel conductive fins positioned on said upper surface of said substrate, each of said fins having a rectangular prism shape comprising:
• a length dimension parallel to said upper surface;
• a height dimension perpendicular to said length dimension;
• and
• a width dimension perpendicular to said length dimension and to said height dimension, said length dimension being greater than said height dimension, and said height dimension being greater than said width dimension, and said length dimension of said fins having a second end and a first end, each of said fins having a bottom surface connected to said upper surface of said substrate and a top surface opposite said bottom surface;
• an insulator covering said first end of said fins, each of said fins having sides between said bottom surface and said top surface, said insulator covering said top surface and said sides of said first end of said fins;
• a first electrical conductor positioned on said insulator, said first electrical conductor being electrically insulated from said first end of said fins by said insulator;
• and
• a second electrical conductor electrically connected to said second end of said fins, said second electrical conductor being connected to said top surface of said second end of said fins,
• said insulator having a thickness sufficient to break down on the application of a predetermined voltage between said second electrical conductor and said first electrical conductor and thereby form an uninterrupted electrical connection between said second electrical conductor and said first electrical conductor through said fins.

A method of forming an anti-fuse structure comprising:

• patterning a plurality of parallel conductive fins on a substrate, each of said fins having a first end and a second end;
• forming an insulator on said fins;
• forming a first electrical conductor on said insulator over said first end of said fins, said first electrical conductor being electrically insulated from said first end of said fins by said insulator;
• removing said insulator from said second end of said fins to expose said second end of said fins;
• and
• forming a second electrical conductor on said second end of said fins,
• said insulator having a thickness sufficient to break down on the application of a predetermined voltage between said second electrical conductor and said first electrical conductor and thereby form an uninterrupted electrical connection between said second electrical conductor and said first electrical conductor through said fins.

A method of forming an anti-fuse structure comprising:

• patterning a plurality of parallel conductive fins on a substrate, such that each of said fins has a rectangular prism shape comprising:
• a length dimension parallel to said upper surface;
• a height dimension perpendicular to said length dimension;
• and
• a width dimension perpendicular to said length dimension and to said height dimension, said length dimension being greater than said height dimension, and said height dimension being greater than said width dimension, said width dimension contacting said upper surface of said substrate, and said length dimension of said fins having a first end and a second end;
• forming an insulator on said fins;
• forming a first electrical conductor on said insulator over said first end of said fins, said first electrical conductor being electrically insulated from said first end of said fins by said insulator;
• removing said insulator from said second end of said fins to expose said second end of said fins;
• and
• forming a second electrical conductor on said second end of said fins,
• said insulator having a thickness sufficient to break down on the application of a predetermined voltage between said second electrical conductor and said first electrical conductor and thereby form an uninterrupted electrical connection between said second electrical conductor and said first electrical conductor through said fins.